Document Type
Article
Publication Date
9-14-2012
Abstract
We report the fabrication and characterization of straight and serpentine low loss trapezoidal silica waveguides integrated on a silicon substrate. The waveguide channel was defined using a dual photo-lithography and buffered HF etching and isolated from the silicon substrate using an isotropic silicon etchant. The waveguide is air-clad and thus has a core-cladding effective index contrast of approximately 25%. Measured at 658, 980 and 1550nm, the propagation loss was found to be 0.69, 0.59, and 0.41dB/cm respectively, with a critical bending radius less than 375μm. The waveguide’s polarization behavior was investigated both theoretically and experimentally. Additionally, the output power shows a linear response with input power up to 200mW.
Recommended Citation
X. Zhang, M. Harrison, A. Harker, and A. M. Armani, "Serpentine low loss trapezoidal silica waveguides on silicon," Optics Express 20, 22298-22307 (2012). https://doi.org/10.1364/OE.20.022298
Copyright
Optical Society of America
Comments
This article was originally published in Optics Express, volume 20, issue 20, in 2012. https://doi.org/10.1364/OE.20.022298